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SITEK & Semitool Spin Rinse Dryers (SRDs)

SITEK offers new and refurbished Spin Rinse Dryers (SRDs) for many industries and applications. We are industry experts in semiconductor wafer cleaning, contact us with any questions.

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Semitool 440 Spin Rinse Dryer (SRD)Semitool 440 Spin Rinse Dryer (SRD)
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Semitool 4400 Spin Rinse Dryer
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Semitool 460-S Spin Rinse DryerSemitool 460 Spin Rinse Dryer (SRD)
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Semitool 470 Spin Rinse Dryer (SRD)Semitool 470 Spin Rinse Dryer (SRD)
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Semitool 480 Spin Rinse Dryer (SRD)Semitool 480 Spin Rinse Dryer (SRD)
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Semitool 8300 Spin Rinse Dryer (SRD)
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Semitool ST-840Semitool 840
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Semitool 860 Spin Rinse Dryer (SRD)Semitool 860 Spin Rinse Dryer (SRD)
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Semitool 870-S & 870-F Spin Rinse Dryer (SRD)Semitool 870 Spin Rinse Dryer (SRD)
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Semitool 880 SRDSemitool ST-880
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Slinger Housing for Ferrofluidic Seal on Semitool & Rhetech SRD
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Slinger Ring Seal
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SMC Valve for ST Model SRD
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SITEK Spin Rinse Dryer Rotor
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Start Switch for ST Series Semitool / Rhetech SRD

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What is a Spin Rinse Dryer (SRD)?

Spin Rinse Dryers are designed to clean and dry semiconductor wafers after various processing steps. They use a combination of centrifugal force, rinse water, and sometimes heated nitrogen to remove particles and contaminants from the wafer surfaces without leaving water marks or residues.

The primary goal is to achieve high cleanliness levels and dry wafers efficiently to prepare them for subsequent manufacturing steps, such as photolithography, etching, or chemical vapor deposition.

What are the key considerations when selecting a Spin Rinse Dryer?

Key considerations include the types and sizes of substrates to be processed, the level of cleanliness required, throughput needs, and compatibility with existing production lines. Additional factors might include the dryer’s footprint, energy consumption, maintenance requirements, and the ability to customize settings and inserts for specific applications

What types of substrates can be processed in a Spin Rinse Dryer?

SRDs are versatile and can handle a wide range of substrates including semiconductor wafers, glass plates, and other flat substrates used in electronics, photovoltaics, and similar high-tech industries. The specific types and sizes of substrates that can be processed depend on the machine’s design and the available inserts or rotors.