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SITEK & Semitool Spin Rinse Dryers (SRDs)

SITEK offers new and refurbished Spin Rinse Dryers (SRDs) for many industries and applications. We are industry experts in semiconductor wafer cleaning, contact us with any questions.

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Fittings Set for SITEK / Semitool SRDs
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PSC-102 Controller for F-Model Semitool & Rhetech SRDPSC-102 Controller for F-Model Semitool & Rhetech SRD
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P-328 Controller for ST-Model Semitool & Rhetech SRD
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Pneumatic Tubing Set for Spin Rinse Dryers
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Process Chamber for 260-S/F Semitool & Rhetech SRD
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Hardware Kit for Spin Rinse Dryers
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P-328I Controller for ST-Model Semitool SRD
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Process Chamber for 270-S/F Semitool & Rhetech SRD
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P-325 Controller for ST-Model Semitool & Rhetech SRD
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Process Chamber for 280-S/F Semitool & Rhetech SRD
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P-228 Controller for ST-Model Semitool SRD
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Process Chamber for 2300-S/F Semitool & Rhetech SRD
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C225 Controller for Semitool ST Model SRD
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CM-20 Controller for Semitool ST Model SRD
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What is a Spin Rinse Dryer (SRD)?

Spin Rinse Dryers are designed to clean and dry semiconductor wafers after various processing steps. They use a combination of centrifugal force, rinse water, and sometimes heated nitrogen to remove particles and contaminants from the wafer surfaces without leaving water marks or residues.

The primary goal is to achieve high cleanliness levels and dry wafers efficiently to prepare them for subsequent manufacturing steps, such as photolithography, etching, or chemical vapor deposition.

What are the key considerations when selecting a Spin Rinse Dryer?

Key considerations include the types and sizes of substrates to be processed, the level of cleanliness required, throughput needs, and compatibility with existing production lines. Additional factors might include the dryer’s footprint, energy consumption, maintenance requirements, and the ability to customize settings and inserts for specific applications

What types of substrates can be processed in a Spin Rinse Dryer?

SRDs are versatile and can handle a wide range of substrates including semiconductor wafers, glass plates, and other flat substrates used in electronics, photovoltaics, and similar high-tech industries. The specific types and sizes of substrates that can be processed depend on the machine’s design and the available inserts or rotors.