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SITEK & Semitool Spin Rinse Dryers (SRDs)

SITEK offers new and refurbished Spin Rinse Dryers (SRDs) for many industries and applications. We are industry experts in semiconductor wafer cleaning, contact us with any questions.

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Antistatic module on SRD
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Stop Switch for ST SRD
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06-01813 SITEK T-Wrench
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Teflon Tubing for Rotor Retaining Bars on SITEK / Semitool SRDs
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Thermostat Disc for N2 Manifold on SITEK / Semitool SRD
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Valve Rebuild- Service
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PSC-101Controller for S/F-Model Semitool & Rhetech SRDPSC-101Controller for S/F-Model Semitool & Rhetech SRD
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Lvl 1 Package - Consumables
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PSC-101Controller for S/F-Model Semitool & Rhetech SRDPSC-101Controller for S/F-Model Semitool & Rhetech SRD
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Level 2 Component Package for SITEK / Semitool / Rhetech Spin Rinse Dryers
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SITEK Spin Rinse Dryer Rotor
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Process Chamber for 240-S/F Semitool & Rhetech SRD
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PSC-102 Controller for F-Model Semitool & Rhetech SRDPSC-102 Controller for F-Model Semitool & Rhetech SRD
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Spare Head Assembly for SITEK / Semitool SRDs
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SITEK Spin Rinse Dryer Rotor

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What is a Spin Rinse Dryer (SRD)?

Spin Rinse Dryers are designed to clean and dry semiconductor wafers after various processing steps. They use a combination of centrifugal force, rinse water, and sometimes heated nitrogen to remove particles and contaminants from the wafer surfaces without leaving water marks or residues.

The primary goal is to achieve high cleanliness levels and dry wafers efficiently to prepare them for subsequent manufacturing steps, such as photolithography, etching, or chemical vapor deposition.

What are the key considerations when selecting a Spin Rinse Dryer?

Key considerations include the types and sizes of substrates to be processed, the level of cleanliness required, throughput needs, and compatibility with existing production lines. Additional factors might include the dryer’s footprint, energy consumption, maintenance requirements, and the ability to customize settings and inserts for specific applications

What types of substrates can be processed in a Spin Rinse Dryer?

SRDs are versatile and can handle a wide range of substrates including semiconductor wafers, glass plates, and other flat substrates used in electronics, photovoltaics, and similar high-tech industries. The specific types and sizes of substrates that can be processed depend on the machine’s design and the available inserts or rotors.