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SITEK & Semitool Spin Rinse Dryers (SRDs)

SITEK offers new and refurbished Spin Rinse Dryers (SRDs) for many industries and applications. We are industry experts in semiconductor wafer cleaning, contact us with any questions.

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LC-5 Servo Amp for Semitool & Rhetech S-Model SRDs
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Micro Switch for SRDMicro Switch for SRD
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Motor Isolator for SITEK / Semitool SRD
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N2 Distribution Manifold for Semitool & Rhetech SRD - Flaretek MountingN2 Distribution Manifold for Semitool & Rhetech SRD - Flaretek Mounting
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N2 Filter for Semitool & Rhetech SRD
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N2 Heater Cartridge
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N2 Heater Manifold for Semitool & Rhetech SRDN2 Heater Manifold for Semitool & Rhetech SRD
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Nylock Jam Nut
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SRD On-Site Service
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Optical Switch PCB for SITEK / Semitool SRDsOptical Switch PCB for SITEK / Semitool SRDs
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Power Switch for PSC 101 SRD Controller
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Pressure Switch
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QD Bolt for SRD Rotor
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QD Rotor Shaft for Semitool SRD

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What is a Spin Rinse Dryer (SRD)?

Spin Rinse Dryers are designed to clean and dry semiconductor wafers after various processing steps. They use a combination of centrifugal force, rinse water, and sometimes heated nitrogen to remove particles and contaminants from the wafer surfaces without leaving water marks or residues.

The primary goal is to achieve high cleanliness levels and dry wafers efficiently to prepare them for subsequent manufacturing steps, such as photolithography, etching, or chemical vapor deposition.

What are the key considerations when selecting a Spin Rinse Dryer?

Key considerations include the types and sizes of substrates to be processed, the level of cleanliness required, throughput needs, and compatibility with existing production lines. Additional factors might include the dryer’s footprint, energy consumption, maintenance requirements, and the ability to customize settings and inserts for specific applications

What types of substrates can be processed in a Spin Rinse Dryer?

SRDs are versatile and can handle a wide range of substrates including semiconductor wafers, glass plates, and other flat substrates used in electronics, photovoltaics, and similar high-tech industries. The specific types and sizes of substrates that can be processed depend on the machine’s design and the available inserts or rotors.