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SITEK & Semitool Spin Rinse Dryers (SRDs)

SITEK offers new and refurbished Spin Rinse Dryers (SRDs) for many industries and applications. We are industry experts in semiconductor wafer cleaning, contact us with any questions.

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Brush Motor with Tapper 8 1/8" shaft for Semitool & Rhetech SRDBrush Motor with Tapper 8 1/8" shaft for Semitool & Rhetech SRD
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1/2 HP Brushless Motor used with 101, 102 & SlickDevice Controller Semitool & Rhetech SRD
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12 Position Manifold for DI Water on 2300 Semitool & Rhetech SRD12 Position Manifold for DI Water on 2300 Semitool & Rhetech SRD
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SITEK Spin Rinse Dryer Rotor
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20 PSI Pressure Switch for SITEK & Semitool SRD
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3/8" Valve Actuator for SITEK & Semitool SRDs & SST/SAT3/8" Valve Actuator for SITEK & Semitool SRDs & SST/SAT
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SITEK Spin Rinse Dryer Rotor
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7 Position Manifold for DI Water on Semitool & Rhetech SRD7 Position Manifold for DI Water on Semitool & Rhetech SRD
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8 Position Manifold for DI Water on Semitool & Rhetech SRD8 Position Manifold for DI Water on Semitool & Rhetech SRD
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8 inch rotor8 inch rotor
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ACR Valve for DI Water Recirculation on SITEK & Semitool SRDsACR Valve for DI Water Recirculation on SITEK & Semitool SRDs
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Back Motor Ball Bearing
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Brush for Brush Motors on Semitool SRD

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What is a Spin Rinse Dryer (SRD)?

Spin Rinse Dryers are designed to clean and dry semiconductor wafers after various processing steps. They use a combination of centrifugal force, rinse water, and sometimes heated nitrogen to remove particles and contaminants from the wafer surfaces without leaving water marks or residues.

The primary goal is to achieve high cleanliness levels and dry wafers efficiently to prepare them for subsequent manufacturing steps, such as photolithography, etching, or chemical vapor deposition.

What are the key considerations when selecting a Spin Rinse Dryer?

Key considerations include the types and sizes of substrates to be processed, the level of cleanliness required, throughput needs, and compatibility with existing production lines. Additional factors might include the dryer’s footprint, energy consumption, maintenance requirements, and the ability to customize settings and inserts for specific applications

What types of substrates can be processed in a Spin Rinse Dryer?

SRDs are versatile and can handle a wide range of substrates including semiconductor wafers, glass plates, and other flat substrates used in electronics, photovoltaics, and similar high-tech industries. The specific types and sizes of substrates that can be processed depend on the machine’s design and the available inserts or rotors.

How to Realign Spin Rinse Dryer Rotor - SITEK SRD Tutorial

How to Realign a Quick-Disconnect Rotor on a SITEK / Semitool Spin Rinse Dryer

If your Spin Rinse Dryer rotor isnโ€™t stopping at 12:00, this guide walks you through aligning the cam, encoder wheel, and RSP sensor on a SITEK/Semitool 8300 SRD. Learn how to lock the rotor in place, verify notch alignment, and tighten all key hardware. Watch the full video to see the process in action.