The Entegris/Fluoroware E90-101-61C02 is a snap style wafer storage box designed for secure handling, storage, and transport of 6 inch (150mm) semiconductor wafers. Its black construction is suitable for cleanroom environments and provides reliable protection during wafer handling and shipping.

This storage box is compatible with Entegris/Fluoroware A182-60MB-064A02 wafer cassettes and is commonly used for 150mm wafer processing applications.

SITEK Part Number

• ENT-E90-101-61C02

Alternative Part Number

• E90-101-61C02