The Genesis Systems 2020 is a Vapor Prime Oven used for wafer surface preparation with HMDS. This compact unit is designed for integration into semiconductor cleanroom environments and provides efficient vapor priming for 200mm wafers.

• Chamber Size: 21.5″ W x 9″ H (8″ clearance to quartz tubes)

• Cabinet Dimensions: 30″ L x 30″ W x 25″ H

• Power: 220V, 50Hz

• Serial Number: S2K2091201

• Pump not included

SITEK Part Number:

• 50829