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SKU: 54869
SITEK 880 Spin Rinse Dryer (SRD) for 8″ / 200mm Wafers
The SITEK 880 is a brand-new Double Stack Spin Rinse Dryer (SRD) designed for high-throughput processing of 8″ / 200mm wafers in low-profile cassettes. With two fully independent chambers, the 880 model allows for redundant operation, enabling one chamber to remain active during maintenance on the other.
Each chamber is equipped with SITEK’s SlickDevice S1/F1 Controller, featuring:
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N2 Saver Option to reduce nitrogen consumption during idle periods
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SECS/GEM compatibility
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Recipe storage for up to 20 processes
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Spin speed and DI resistivity monitoring
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Preventative maintenance alerts
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Integrated troubleshooting support
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Fail-state monitoring for anti-static, heater, and blanket systems
Key Features:
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Brand New, Built by SITEK
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Dual-Chamber Configuration for Redundancy
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Supports 8″ / 200mm Low Profile Cassettes
Important Note:
All Double Stack Spin Rinse Dryers require two of each option, such as rotors, static eliminators, or resistivity monitors — one for each chamber.
SITEK Part Number:
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54869
Product Details
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Product Details
For further information, please contact SITEK.
SITEK Spin Rinse Dryers are customizable to your needs, the potential options for the SITEK 880 include:
- Audible Alarm
The process run blue LED on the system status light indicator is replaced with an audible alarm. - N2 Purge Saver
An alternative valve configuration that reduces N2 purge in idle to 0 CFM by eliminating flow to the labyrinth seal and antistatic unit. - Water Recirculation
A tee fitting is included for water recirculation to either drain or any return line to facility recirculation. - Antistatic Feature
A component that static ionizes the process chamber during dry cycles. - Resistivity Probe
Resistivity of the waste water is measured and displayed on the S1 controller. This also allows for Q-rinse, which is a software setting for rinsing to a specific resistivity set point. - Emergency Machine Off (EMO)
An emergency off button on both the front and back of the SRD. - Leak Detection (Requires EMO Feature)
A leak detect sensor is added to the base of the system to EMO if a leak occurs. - FM4910 Fire Retardant Skins
Fire retardant material is used for the outer skins. - Surfactant Dispense
An additional step is included in the software, so the user can hook up a pressurized vessel and dispense surfactant as the first process step. - CO2 Injection
An alternative valve configuration that allows the user to set up a CO2 canister which will mix with the DI water during rinse steps. - Rotor Adapter Inserts
This product adapts the rotor from running a larger substrate size to a smaller one without changing out the rotor. This is recommended for customers running multiple substrate sizes in the same chamber.
