The ePB-6/150-25-R.10 cassette is designed for handling 6″ / 150 mm wafers.
This low-profile design provides reliable wafer support and compatibility with various wafer processing systems.
It is comparable to the Entegris/Fluoroware A190-60M-0215 cassette model.

Specifications:

• Size: 6″ / 150 mm

• Low-profile design

• Compatible with Entegris/Fluoroware A190-60M-0215

SITEK Part Number:

• ePB-6/150-25-R.10

Alternative Part Numbers:

• eWB0318-eM-39-NAT