The Entegris/Fluoroware E124-60-101-61C02 is a drop front wafer storage box designed for the secure handling, storage, and transport of 150mm semiconductor wafers. Constructed from black STAT-PRO 100 material, it provides static dissipative protection and is compatible with automated wafer handling systems. The drop front design allows easy access by robotic end effectors.

Features include smooth surfaces for easy cleaning and low particle generation, durable pin and socket hinges with retainers, stackable construction, and single carrier capacity. This storage box is compatible with all 25-capacity wafer carriers without handles.

Compatible Entegris/Fluoroware PA182-60MB-61C02 and A194-60MB-61C02 wafer cassettes/carriers are also available.

SITEK Part Number

• ENT-E124-60-101

Alternative Part Number

• E124-60-101-61C02