This Entegris wafer handle is designed for secure and ergonomic handling of 6″ (150mm) wafers. The squeeze-style mechanism provides a firm grip, while the integrated lock bar ensures stable wafer retention during transport or processing. Constructed from natural PFA for excellent chemical resistance and cleanroom compatibility.

Cassette Compatibility:
All “M” Style, 182 Series, and 194 Series Cassettes

SITEK Part Number:

• ENT-A040-103-0215

Alternative Part Numbers:

• eOP0171-6-ASSY-1

• ENT-A040-103-0215