This rack is designed to accommodate 6″ (150mm) single wafer carriers, including:

• Entegris H22-60 bottom

• Entegris H22-601 lid

• Entegris H22-602 spring

Compatible with Entegris/Fluoroware HTC 8000 box washer systems, as well as SITEK model box washers.

Available in:

• Electropolished Stainless Steel

• Halar-Coated Finish

SITEK Part Number:

• EQP-10718