Box Washer Rack for 4″ Wafer Cassettes

This rack is designed to accommodate 4″ wafer cassettes/carriers, including:

• Entegris PA182-39M

• Entegris PA72-40MB

• ePak EPB-4-100

• ePak EPB-4-100-25

Compatible with Entegris/Fluoroware HTC 8000, 8010, 8020, and 8030 box washer systems, as well as SITEK model box washers.

Available in:

• Electropolished Stainless Steel

• Halar-Coated Finish

SITEK Part Numbers:

• EQP-10191

• EQP-10188