Genesis Systems Vapor Prime Ovens are high-reliability tools designed for wafer surface preparation in semiconductor manufacturing. These ovens are used to apply a uniform layer of adhesion promoter—typically hexamethyldisilazane (HMDS)—to wafers before the photoresist coating process. This improves resist adhesion and helps prevent pattern defects during lithography.

Engineered for cleanroom environments, Genesis Vapor Prime Ovens feature durable stainless steel construction with electropolished interiors to minimize contamination. They provide precise thermal control and consistent vapor delivery, ensuring uniform priming across all wafers in a batch. The ovens are compatible with various wafer sizes and can be used in both standalone setups and integrated process lines. 

Known for their reliability, simplicity, and ease of maintenance, Genesis Vapor Prime Ovens are a common fixture in semiconductor fabs looking to enhance process stability and improve yields in photolithography workflows.