Custom Wafer Cassettes/Carriers
Daniel Mullany demonstrates SITEK’s capability to design custom wafer cassettes and carriers for any size or material type. Whether you’re working with square substrates, small fragments, or uniquely shaped wafers, SITEK can provide a reliable handling solution to streamline your wet process flow.
What Are Custom Wafer Cassettes?
Custom wafer cassettes, carriers, or boats are designed to fit your proprietary semiconductor substrates, keeping them safe and secure during rinse and drying cycles in the SRD (Spin Rinse Dryer) or during chemical baths in wet benches.
Each cassette is:
- Tailored to your substrates’ shape, size, and material
- Engineered for safe chemical exposure
- Designed to reduce handling and improve throughput
- Compatible with SRDs using custom adapters or inserts
Example Configurations:
1. Multi-Row Small Substrate Cassette
Holds several rows of smaller substrates securely. Ideal for fragment testing or R&D wafers.
2. Square Substrate Carrier with Handle
Equipped with a custom handle for safe transfer into chemical baths and SRDs.
3. Custom Round Cassette
Looks like a standard Entegris/ePAK cassette, but features unique internal dimensions for non-standard substrates.
Integration Options:
These custom cassettes can be used in Spin Rinse Dryers with the help of rotor inserts, which allow you to adapt a standard 6″ or 8″ rotor for smaller or custom-sized cassettes. If you’re not familiar with inserts, check out our companion video for more details.
Why Use a Custom Wafer Cassette?
- Reduces manual handling and operator error
- Eliminates the need for tweezers or nitrogen blow-drying
- Streamlines chemical processing and SRD compatibility
- Ideal for R&D, specialty wafers, and small-volume production
Ready to Design Yours?
If you’re working with fragile, non-standard, or uniquely sized substrates, we’ll help you design a solution. Call us at (916) 797-9000 and ask for Daniel at extension 2201, or reach out via our contact form.
Need help servicing your SRD?
📞 +1 916-797-9000
✉️ sales@sitekprocess.com
We repair and support Semitool, Verteq, and SITEK Spin Rinse Dryers, and we carry all the spare parts you need.
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