This Process Chamber has a 380mm / 15″ Bowl opening and is designed to run substrates up to 300mm / 12″. This Chamber size fits the 2300-S/F Models of the Semitool & Rhetech Spin Rinse Dryer Lines.

The Bowl (also called the Process Chamber) of a Spin Rinse Dryer (SRD) provides the environment for rinsing and drying your substrates.

SITEK Part Number:

• 06-00489

Alternative Part Number:

• 04-151100