The A97-15 cassette is designed for handling 7″ / 178 mm square substrates.
It features a durable white construction and provides reliable support and alignment for precision wafer or substrate processing.
Originally manufactured by Empak, this design was later integrated into the Entegris product line.

Specifications:

• Accepts 7″ square substrates

• 10 slots

• Color: White

SITEK Part Number:

• ENT-A97-15

Alternative Part Number:

• A97-15