This Entegris/Fluoroware wafer cassette is designed for 6″ (150mm) wafers. Made from high-purity Teflon (PTFE), it provides superior chemical resistance and dimensional stability for wet-process and cleanroom applications. The cassette features 13 precision-molded slots for secure and even wafer spacing.

Features:

• For 6″ (150mm) wafers

• Material: Teflon (PTFE)

• 13 wafer slots

• Chemically resistant, high-purity construction

SITEK Part Number:

• ENT-A72-60-MBW

Alternative Part Numbers:

• A72-60-MBW-0215