The A182-39MU-0215 cassette is designed for handling 4″ / 100 mm wafers.
It offers reliable wafer support and compatibility across multiple cassette types and manufacturers.

Cross-References:

• ePak ePB-4/100-25

• CR100A-D

• A72-40M / A72-40MB (Entegris/Fluoroware)

SITEK Part Number:

• ENT-A182-39MU-0215

Alternative Part Number:

• A182-39MU-0215