This Entegris/Fluoroware wafer carrier is designed for 4″ (100mm) substrates. Made from high-purity Teflon (PTFE), it provides excellent chemical resistance and dimensional stability for cleanroom and wet-process use. This model serves as a plate mask carrier and is compatible with handle A027-0215.

Features:

• For 4″ (100mm) substrates

• Type: Plate Mask Carrier

• Material: Teflon (PTFE)

• Compatible Handle: A027-0215

SITEK Part Number:

• ENT-A69-0215

Alternative Part Numbers:

• A69-0215