Semitool Batch Spray Processors
(SST, WSST and SAT Systems)
SITEK provides Semitool SST, WSST, and SAT systems, as well as parts to support your wet process needs.
SITEK provides Semitool SST, WSST, and SAT systems, as well as parts to support your wet process needs.
Semitool WSST – Wet Spray Solvent Tool
The Semitool WSST (Wet Spray Solvent Tool) expands on the capabilities of the SST by supporting a wider range of wet chemical processes. WSST systems are commonly used in advanced solvent applications requiring precise control, chemical compatibility, and flexible recipe programming. SITEK refurbishes WSST units to deliver dependable operation with upgraded controls and modernized components.
Semitool SST – Spray Solvent Tool
The Semitool SST (Spray Solvent Tool) is engineered for solvent-based wafer processing, including photoresist stripping, cleaning, and developing. Designed for high-performance and uniform chemical distribution, SST systems utilize a spray-based approach to ensure effective and repeatable results. SITEK offers fully refurbished SST systems, restored to OEM specifications, ready for cleanroom integration.
Wafer Handling for Semitool SAT - Spray Acid Tool
The Semitool SAT (Spray Acid Tool) is designed for acid-based processes such as wafer cleaning, etching, and oxide removal. These systems use spray technology to apply acids like HF, HCl, or H2SO4 in a controlled, enclosed environment—ensuring both safety and process consistency. SITEK supports SAT systems with refurbished tools, custom rotors, and expert servicing to keep your acid processing applications running safely and efficiently.
Repair & Service
Our service team provides the same expert support for SST, WSST, and SAT systems as we do for box washers:
On-site maintenance and troubleshooting
Full tool refurbishment and reconditioning
Preventative maintenance kits and service plans
Spare parts sourcing and custom configurations
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We send experienced technicians directly to your fab to minimize downtime and keep your wet process tools performing at their best.
Spare Parts Support
SITEK stocks select spare parts for Semitool Spray Solvent Tools (SST), Wet Spray Solvent Tools (WSST), and Spray Acid Tools (SAT). From valves and heaters to controllers and fittings, we offer reliable replacement components to support maintenance, upgrades, and tool longevity. Let us help you source hard-to-find or legacy parts for your wet process systems.
Custom Rotors & Cassettes
SITEK provides custom rotors and cassettes for Semitool SST, WSST, and SAT systems. Built to match your wafer size, process, and tool configuration, our components are available in Teflon, stainless steel, and hybrid materials. We offer solutions for legacy tools, non-standard pitches, and unique chemical requirements—ensuring reliable fit and performance.
Browse our current inventory of Mask Cleaners & Wafer Scrubbers in the SITEK shop.
Inquire About Batch Spray Processors
Our team is ready to help you with any batch spray processor questions or requests. Please submit the form below and we’ll be in contact with you.Â