Box Washers
SITEK Box & Cassette Washers
In addition to supporting legacy HTC tools, SITEK engineers and manufactures our own line of cassette and box washers—designed for maximum throughput, simplified maintenance, and full compatibility with modern semiconductor fabs.
Why Choose SITEK Washers?
Entegris / Fluoroware
HTC Cassette & Box Washers
SITEK supports the full line of Entegris / Fluoroware HTC cassette and box washers. Known for their stainless steel construction, dual-action peripheral cleaning, and reliable performance, these tools handle a wide range of wafer carriers—including cassettes, boxes, FOUPs, mask holders, and shippers.
Each system features a spacious 40″ x 40″ x 20″ process chamber, integrated DI water and surfactant tanks, a 500 CFM hot air blower, and PLC-based controls.
All units are fully refurbished and include the SITEK controller upgrade.
Custom Process Racks
SITEK specializes in precision-engineered process racks for every major wafer carrier format. Whether you’re working with standard cassettes, shipping boxes, FOUPs, or custom carriers, we can design and manufacture racks to fit your exact needs.
Available in Electropolished Stainless Steel or Halar-Coated Finish
Built for all common wafer sizes & custom applications
Compatible with all box washers
SITEK provides comprehensive refurbishment services for HTC and SITEK box washers. Our skilled technicians restore your equipment to like-new condition by upgrading components and performing thorough testing. Additionally, we provide preventative maintenance kits and plans, along with field service and onsite troubleshooting across North America.
SITEK offers extensive spare parts support for both HTC and SITEK box washers. With most parts in stock—from mechanical components to controllers and blowers—we ensure fast shipping and precise part-matching services.
Common spare parts include:
- Spray arms and manifolds for DI water heaters, tanks, and valves
- Surfactant dosing equipment HEPA filters, blowers, and heaters
- Electrical panels, PLC controllers
- Seals, gaskets, fasteners, and hardware
- Custom and OEM process racks
Just send us the part number or photo—we’ll take care of the rest.
Browse our current inventory of Box Washers and Spare Parts in the SITEK shop.
Inquire About Box Washers
Our team is ready to help you with any box washer questions or requests. Please submit the form below and we’ll be in contact with you.Â