Model:

• ePAK ePB-8200-25-R6

ePAK cassettes are widely used in semiconductor manufacturing for handling, cleaning, and transporting wafers during wet processing and drying cycles. Designed for precision and durability, these cassettes are compatible with Spin Rinse Dryers (SRDs), wet benches, and box washers, and are available in a wide range of sizes and configurations.

These cassettes are typically made from high-purity fluoropolymers or engineered plastics, offering excellent chemical and thermal resistance for demanding cleanroom environments.

Common Applications:

• Spin Rinse Dryers (SRDs)

• Wet benches and chemical processing tools

• Entegris / Fluoroware HTC Box Washers

• Storage and transport of semiconductor substrates

Key Features:

• Precision molded for secure wafer retention and automated handling

• High chemical and thermal resistance

• Various styles available, including mesh bottoms, slotted sides, or reinforced handles

SITEK Part Number:

• ePB-8200-25-R6