This rack is designed to accommodate 6″ wafer cassettes/carriers, including:

• Entegris A182-60MB

• Entegris KA182-60MB-47C02

Compatible with Entegris/Fluoroware HTC 8000, 8010, 8020, and 8030 box washer systems, as well as SITEK model box washers.

Available in:

• Electropolished Stainless Steel

• Halar-Coated Finish

SITEK Part Numbers:

• EQP-10429

• EQP-10221