The Empak A91-50-09 is a 5 inch (127mm) solar square wafer cassette designed for handling square substrates in semiconductor and photovoltaic applications. It features 20 slots with a 3.2mm pocket flat and is constructed from high density polyethylene for durability and cleanroom compatibility.

This cassette is compatible with the Entegris E55-0003 storage box and is commonly used as part of the Entegris E Series Mask Carrier Shipping Box assembly. This listing includes the cassette only.

SITEK Part Number

• EMP-A91-50-09

Alternative Part Numbers

• A91-50-09