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SKU: 06-01779

Insert/Adapter: A192-81M Rotor to A72-20M Cassette

SITEK Rotor Inserts allow you to run multiple wafer sizes within a single Spin Rinse Dryer (SRD) chamber. These inserts are designed to fit securely into an existing rotor, reducing changeover time and eliminating the need for complete rotor replacements when switching between substrate sizes.

Ideal for fabs processing a variety of wafer types, or transitioning between legacy and modern substrate formats, these inserts offer a cost-effective, space-saving solution for maximizing SRD flexibility.

 

This insert allows compatibility between A192-81M rotors and A72-20M wafer cassettes.
It is designed for use with new SITEK A192-81M rotors (not compatible with older Semitool-style rotors).

 

Watch this video to learn more:

Thumbnail for Youtube Video about Custom Rotor Inserts

 

SITEK Part Number:

  • 06-01779

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