SITEK Rotor Inserts allow you to run multiple wafer sizes within a single Spin Rinse Dryer (SRD) chamber. These inserts are designed to fit securely into an existing rotor, reducing changeover time and eliminating the need for complete rotor replacements when switching between substrate sizes.

Ideal for fabs processing a variety of wafer types—or transitioning between legacy and modern substrate formats—these inserts offer a cost-effective, space-saving solution for maximizing SRD flexibility.

This insert allows compatibility between A182-60MB rotors and A182-39MLB (or M) wafer cassettes.
It must be used with a new SITEK A182-60MB rotor (not compatible with older Semitool-style rotors).

• The ePB-4/100-25-R.9-eM-39-NAT cassette also works perfectly with this insert.

Watch this video to learn more:

SITEK Part Number:

• 06-01678