The Tencor Alpha Step 200 is a precision profilometer designed for measuring step heights, etch depths, coating thicknesses, micro-roughness, and other high-accuracy surface characteristics. This system provides reliable, repeatable results for process control in semiconductor and materials research applications.

Key Features:

• Measures step heights, etch depths, coating thicknesses, and micro-roughness

• Vertical sensitivity for small steps: 20–50 Å

• Vertical resolution: 5 Å with ±160 kÅ range, 5 nm with ±160 mm range

• Video zoom with 40x to 120x magnification

• Accommodates wafers up to 150 mm (6″)

SITEK Part Number:

• 50018