The Technics PE-II-A is a versatile plasma etcher and stripper, designed for low-pressure, low-temperature plasma processes. This system enables a wide range of plasma reactions such as ashing and etching, making it a reliable tool for semiconductor labs and fabs.

Key Features:

• Generates a low-pressure, low-temperature gaseous plasma

• Performs plasma reactions including ashing and etching

• Provides up to 500W at 30 kHz

• Anodized aluminum process chamber with anodized upper electrode

• Water-cooled upper electrode and baseplate for stable operation

• Equipped with a 0–10 Torr Baratron

• Front panel vacuum pressure display with LED indicators from 0 to 1999 mTorr

SITEK Part Number:

• 50633