This Process Chamber has a 290mm / 11.5″ Bowl opening and is designed to run substrates up to 150mm / 6″. This Chamber size fits the Semitool & Rhetech ST-270 Spin Rinse Dryer.

The Bowl (also called the Process Chamber) of a Spin Rinse Dryer (SRD) provides the environment for rinsing and drying your substrates.

SITEK Part Number:

• 06-00473

Alternative Part Number:

• 04-132105
• 12888-507EP
• ST12888-507EP