This Process Chamber has a 300mm / 12″ Bowl opening and is designed to run substrates up to 200mm / 8″. This Chamber size fits the 280-S/F Models of the Semitool & Rhetech Spin Rinse Dryer Lines.

The Bowl (also called the Process Chamber) of a Spin Rinse Dryer (SRD) provides the environment for rinsing and drying your substrates.

SITEK Part Number:

• 06-00292

Alternative Part Number:

• 04-142100