3″/75mm SRD Rotors for SITEK, Verteq, Semitool & Rhetech SRDs

We offer both new and refurbished 3″/75mm SRD rotors for SITEK, Verteq, Semitool, and Rhetech Spin Rinse Dryers, compatible with ST, F, and S models. Available in both 4-bolt and quick-disconnect designs, these rotors are ideal for processing small wafers or photomasks.

All refurbished rotors are precision balanced and newly electropolished, delivering performance comparable to new rotors at approximately 50% of the cost.

Rotors can be configured to support both round wafers and square masks, depending on your application. Custom and Teflon-coated rotors are also available upon request.

Cassette Compatibility:

• A72-30

• A72-30M

• A82M

• A190-30M

• A108-30

Customers must provide the exact cassette number for proper fit.

SITEK Part Number:

• 315