Manufacturer:	Semitool		Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	SRD-06-01971
Condition:	New
Asking Price:	Contact Sales
Inventory Number:	06-01971

Description: Match set, Rotor, A192-81M, QD, 280 and Insert, for Entegris cassette A190-60M (stainless steel) (SRD-06-01971)

Match set, A192-81M, QD, 280 rotor and SS insert to accommodate the Entegris A190-60M cassette

* This Rotor and Insert/Adapter set allows the customer to run a rotor to accomodate the Entegris A192-81M cassette and then slide in the insert/adapter to now run the Entegris 6", A190-60M cassette.
* Insert/Adapter only take s10 sconds to change the cassette/wafer size.

*Rotor is balanced for 0-25 substrates

* Insert specifications
- 0-25 substrates
- Able to withstand 90C solvent
* Construction:
- 304L stainless steel
- FEP bumpers between rotor and insert
- FEP bumpers for wafers
** No stainless on stainless contact

Combination is done by purchaseing these 2ea Sitek parts: Insert: 06-01827, Rotor: 06-00267