Description: MTI Flexifab Photoresist Prime, Coat and Bake System
(MTI Flexifab Coater)
MTI Flexifab Photoresist Prime, Coat and Bake System
* System configuration: 1ea Controller 1ea Send/Receive Module 1ea. Vacuum prime module 1ea Coater Module Developer Module (Configured with 2ea Millipore pump, top side edge bead removal and bowl rinse ) 1ea. Bake Modules * System can accommodate 3" to 8" wafers * Modular design * System is sold as fully refurbished * System set up is available * Full spare parts support is available Note: We can add more (up to 4ea.) or change out any type Photoresist pumps ie IDI, cybor, Millipore, etc on this tool.
You can also see 2 Video's of MTI Flexifab's running on these these links:
http://sitekprocess.com/commerce/catalog/product.jsp?product_id=5100&czuid=1331318887126
http://sitekprocess.com/commerce/catalog/product.jsp?product_id=5101&czuid=1331319209830
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