Description: Rudolph Auto EL IV Ellipsometer
(Rudolph EL IV Ellipsometer)
Rudolph Auto EL-IV Ellipsometer
* Multi-Wavelength Automatic Ellipsometer. * User can select between 3 wavelengths-405 nm, 546 nm , 633 nm. * Display film thickness, index order thickness or substrate N and K. * Capable of calculating the parameters for single or double absorbing films and non-absorbing films. * 115V, 60 Hz.
System #1
* EQP-00921 * Rudolph Auto EL IV * Serial # 70152 * SS2 option * 405nm, 546nm and 633 nm wave lengths * System was removed fully operational from a wafer fab * Needs: Hamamatsu photomultiplier tube # R928-13
|