Description: MTI Flexifab Photoresist Coater
(MTI-20-705020)
MTI Flexifab Photoresist Coat Track
(4) module configuration : Send/Coat/Hot Plate/Receive
Set up for 150mm wafers - Wafer size can be changed to process 100-200mm
Coat module includes (2) resist dispenses. Topside EBR, backside EBR, bowl wash. Canisters for solvent
Hot plate max temp 250c
Sitek offers installation, field service, spare parts and phone support on all Flexifab systems.
System includes warranty.
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