Solitec Optitrac

System design (see below for details):

* Coater island
* HMDS VVP module (non working)
* 4 IDI400 resist pumps, programmable dispense "stroke" (various degree of
   functionality)
* Two arm resist spin module, up to 6000RPM spin speed, TSEBR, BSEBR and
   cup rinse.
* Prebake/softbake hotplate (and cool plate) module 50-350degC

Developer island
* Post exposure bake hotplate (and cool plate) module 50-350 deg C
* Two arm developer spinner module, with two 10litres developer canisters
   connected
* Post bake/hard bake hotplate (and cool plate) module 50-350degC
   (non-working)

* Chillers (partially working) control the temperatures of the resist,
   developer and cool plates.

* External electronics rack and power control center

* Set up for 4" wafers

* Vintage: 1997