Description: Matrix 104 Asher
(Matrix Model 104 Asher)
Matrix 105 Asher
The Matrix System One Model 104 Asher is a single chamber, automatic microprocessor-controlled photoresist stripper, setup for 4" - 6" wafers.
*Model 105 *Configured for up to 6" wafers *Single wafer, single cassette *Independent control of pressure, RF power, temperature, gas flow, & substrate position *Multi-step program (three steps + over etch) process program *"Butterfly" Valve for more precise pressure control. *Phase magnitude detector to provide real-time RF impedance matching control. *Two Mass Flow Controllers *Vacuum Hose Assembly *Range for Strip: *Range for Descum: *Wafer Lift Pin Assembly (up and down)
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