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Current: Catalog : Matrix 104 Asher (Matrix Model 104 Asher)


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Manufacturer: Matrix Email Us
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Mfg. Part#: Matrix Model 104 Asher
Condition: Used
Asking Price: Contact Sales
Inventory Number: 51168

Description: Matrix 104 Asher (Matrix Model 104 Asher)

Matrix 105 Asher

The Matrix System One Model 104 Asher is a single chamber, automatic microprocessor-controlled photoresist stripper, setup for 4" - 6" wafers.

*Model 105
*Configured for up to 6" wafers
*Single wafer, single cassette
*Independent control of pressure, RF power, temperature, gas flow, & substrate position
*Multi-step program (three steps + over etch) process program
*"Butterfly" Valve for more precise pressure control.
*Phase magnitude detector to provide real-time RF impedance matching control. 
*Two Mass Flow Controllers
*Vacuum Hose Assembly
*Range for Strip:
*Range for Descum:
*Wafer Lift Pin Assembly (up and down)


Matrix 104 Asher






Specifications







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Due to equipment location and/or prior sale, some pictures are used for "reference only."
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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