Description: Tegal 421 Etcher
(Tegal 421 Etcher)
Tegal 421 Barrel Etcher
* Tegal 921 photoresist stripper/backside etcher * Operational Dual channel Barrel asher/etcher. * Temperature control * Two gas inputs * ENI ACG-5XL RF Generator, 13.56Mhz 500 watts. * Upgrade with Raines/Theis auto tune and baratron. * Two in stock.
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