Description: SVG 8126 PC / 8136 Coat and Track
(8100 Series Coater / Developer)
SVG Track Photoresist Coater
** Update confirugration when tool arrives*** * Coat controllers: 8126 PC/ 8136 HPO * Coat Process: Send-Coat-Bake-Bake-Receive * Devlop Process: Send-Devlop-Chill-Receive * Current wafer size: 3" * System will be refurbished
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