Description: Prometrix FT-650
(Prometrix FT-650)
Prometrix FT-650
* Film Thickness Mapping System * Measures single or multiple layers or oxide, nitride, photoresist, polysilican and other optical transparent films. * Measurement capabilities from 100 angstom to greater that 4 microns. * Analysis capabilities: Mapping: Die, Contour, 3-D maps. * Scanning: Diameter scan * Sampling: Quick tests, user definable tests * Cassette to cassette wafer handling * Measurement capabilities: * Measurement: Film thickness, reflexivity. * Spot sizes: 4um to 80um * Number of layers: Up to 3 * Standard wafer sizes: 3, 3.25" and 100, 125, 150, 200mm. * Interface Serial# 9101F6 * Probe station serial # 9104F7 * Elevator Station # 911C4FT * Olypmus objectives: MS PLan 2.5x, 5x, 10x, 20x and a ULWD MS plan 50x * Mfg in 1990
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