Description: SVG 8126 PC / 8132 CTD Coat and Develop Track
(8100 Series Coater / Developer)
SVG Dual Track Photoresist Coater and Developer
* EQP-00554 * Coat controllers: 8126 PC/ 8136 HPO * Develop controllers: 8132 CTD/ 8136 HPO & 8636 HPO * Dual track system. * Coat Process: Send-Coat-Bake-Bake-Receive * Devlop Process: Send-Devlop-Chill-Receive * Current wafer size: 3" * System will be refurbished
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