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Current: Catalog : Semitool 840-S Spin Rinser Dryer (Semitool 840S SRD)


Product Details
Manufacturer: Semitool Email Us
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Mfg. Part#: Semitool 840S SRD
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 50182

Description: Semitool 840-S Spin Rinser Dryer (Semitool 840S SRD)

Semitool "Dual Stack" 840-S Spin Rinser Dryer

* Dual system in a double stack configuration.
* Capable of processing up to 4" wafers.
* PSC-101 Digital controller
* Class 10 Poly design
* Brushless motor
* Labryrinth N2 seal
* Quick disconnect (single bolt rotor design)
* Motor controller via a servo amp.

* Possible options include:
   1. Static eliminator
   2. DI Resistivity monitor
   3. DI Water recirculation.

This system can also be upgraded to the Sitek State-of-the-art Slick Device S1 controller. This controller upgrade makes this the most advanced Spin RInser Dryer in the world.

Please see this link for its capabilities:

http://www.sitekprocess.com/commerce/catalog/product.jsp?product_id=5877

Systems are offered as "fully refurbished". 

Note: All double stack Spin Rinser Dryers will require 2 each of any options or rotors specified.

***See spares category for a complete list of all Semitool consumables, spares, rotors and system options.***

https://youtu.be/R3lzw1kBwjM



    Semitool 840-S Spin Rinser Dryer






Specifications







Controller Compatability PCS-101, PCS-102 
DI Water Recirc Capable YES 
Motor Seal Labyrnith 
Motor Type Brushless 
N2 Heater Capable YES 
Resistivity Monitoring Capable YES 
Rotor Type Quick Disconnect 
Static Eliminator Capable YES 
Substrate size 125 mm Max. 
System Configuration Roll Around Double Bowl 
Specification Url  
840-S SRDs Source Inspection 6-7-17 840-S SRDs Source Inspection 6-7-17  
Semitool 840-S acceptance video Semitool 840-S  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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