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Description: March Stripper model CS-1701
(March CS-1701 etcher)
March CS-1701 Etcher/Stripper
Tool Description:
The March CS 1701 Reactive Ion Etching system delivers performance
often associated with high- investment etching tools. The system is excellentfor metal etching, silicide etching and etching of III-V compounds, anisotropic etching of nitrides, oxides and polyimides.
Key performance features of the CS 1701 system include the large DC bias and the ability to control process pressure independent of gas flow. The system allows users a wide variety of etch profiles ranging from anisotropic requiring high aspect ratios to sloped walls.
System has 3 or 4 process gases (via MFC's) and a N2 purge. Our system has 3 gases. Calibrated at:
* Gas 1 = 100 sccm
* Gas 2 = 25 sccm
* Gas 3 = 250 sccm
Manufactured June 2001
Please see below the Technical Specification for this tool from the Original OEM.
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