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Current: Catalog : Matrix 303 Etcher (Matrix Model 303 Etcher)


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Manufacturer: Matrix Email Us
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Mfg. Part#: Matrix Model 303 Etcher
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 997

Description: Matrix 303 Etcher (Matrix Model 303 Etcher)

Matrix 303 Etcher

*Programmable microprocessor controlled system
*Capable of handling wafer sizes from 2 in. to 6 in
*Cassette loading
*ENI OEM-6XL 13.56 Mhz
*600W RF Generator
*Temperature controlled
*Previous gases used: NF3, O2, N2, He. 200/240V, 1 Ph, 50/60 Hz
*Used for Isotropic etches such as Nitride, Poly and Oxides


Matrix 303 Etcher






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Due to equipment location and/or prior sale, some pictures are used for "reference only."
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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