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Current: Catalog : Tegal 1511E (1511E)


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Manufacturer: Tegal Email Us
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Mfg. Part#: 1511E
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 30

Description: Tegal 1511E (1511E)

Automatic optical emission type endpoint detection. Can be configured for 3" to 6" substrates. Power requirements: 208V, 3 Phase, 5 wire, 30A, 60 Hz.


Tegal 1511E






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Due to equipment location and/or prior sale, some pictures are used for "reference only."
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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