Description: Tegal 915 Barrel Etcher
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Tegal 915 Barrel Etcher
*Tegal 915 Batch photoresist stripper/backside etcher *Power supply: Solid State RF *Freq.: 13.56 MHz *Maximum power: 500W *Tuning: Auto Impedance Matching 200/240 V selectable *50/60 Hz *Single Phase *30A with Tegal Computer.
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