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Description: Controller, SITEK SlickDevice S1 controller - S1 - Plastic connectors - 110-220V
(SRD-906-02000)
Sitek's new "state of the art" touchscreen graphical controller (SlickDevice S1)
* Includes Sitek's proprietary state-of-the-art N2 saver option.
This option turns off the LPP when the SRD chamber is not processing wafers.
This option can save customer thousands of dollars annually on not wasting N2 while the tool is idle.
* Up to 5 process recipes
* Preventative maintenance capabilities
* Troubleshooting assistance
* Data logging
* Alerts you if the Anti Static module, N2 heater element or bowl blanket heaters have failed.
Please see this dropbox link for a video on how the new SlickDevice S1 helps particle control
and yielded enhancements via our Anti Static module monitoring:
* Displays resistivity and spin speed
* Used on "S" models only.
Recent upgrades:
* DI water Detection. System will alarm if the DI water fails to spray in the rinse cycle
* Capability of turning of or off N2 heat in any of the dry cycles
* SECS/GEM upgrade (optional)
* Chemical dispense (optional - SRD must be upgraded)
Over 700ea controllers shipped....
Note: Our SlickDevice S1 is compatible with 110-120V and 220-230V.
Please identify your needed power & plug type on order placement.
Youtube Training Video:
https://www.youtube.com/watch?v=T0UXdRVDc54
https://www.dropbox.com/s/v5t6gllxs89vtj9/Slick%20Device%20S1%20anti%20static%20monitoring%20and%20RPM%20learing%20demonstration.MTS?dl=0
https://www.youtube.com/results?search_query=sitek+process+slickdevice
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