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Description: Headway PWM32-PS-CB15 Coater
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Headway Research PWM32-PS-CB15 Coater
* Photoresist coater/spinner
* Capable of processing 300mm wafers
Specifications:
* PS Motor: Up to 10,000 rpm, for relatively light loads such as silicon wafers, small photomasks, etc.
* CB15 Bowl: 15-inch I.D., reduced by a removable splash deflector (12.75-inch opening) to a maximum recommended substrate dimension of 12 inches.
* For smaller substrates, the standard splash deflector (11.35-inch opening) limits the maximum recommended substrate dimension to about 10.5 inches.
* For the maximum recommended diameter or diagonal substrates, the accessory substrate lifter/loader is recommended because of the limited clearance between the substrate and splash deflector during loading and unloading.
* Larger substrates may be handled by removing the splash deflector but undesirable backsplash or splatter from the bowl may be the result.
* Spinning at up to 10,000 rpm with the PS motor in the CB15 bowl requires that the user consider the hazards of centrifugal force to the substrate and operator safety.
* Large diameter substrates may be stressed to beyond the tensile strength of the material at speeds less than 10,000 rpm.
* If heavy or large dimension substrates can be processed at speeds less than 2,500 rpm, the heavy duty BD motor in the CB15 arrangement or the LS22 or IT22 (another spinner family) arrangement is recommended.
* The CB15 motor package has two drain lines from a removable polyethylene liner in the stainless steel bowl. * The bowl has an air exhaust port for pulling air down through the bowl and out of the lab environment.
* The air exhaust rate becomes a part of the spin coating process, and in critical coating applications, should be monitored and regulated.
* A port on the exhaust tube provides for attaching a Magnehelic (or other) sensor for visual or automatic monitoring of the air exhaust status.
* For closed-chamber inhibited drying spin coating (see HRI Technical Note H-18-93 on IDS), an accessory exhaust damper and bowl cover is available.
* With the bowl covered during coating, the PWM32 controller can be programmed to close the accessory exhaust damper during a process.
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