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Description: Cybor Photoresist pump controller - Model M7500 Pump - Positive Displacement Technology
(IDI 650)
Cybor M7500 Pump - Positive Displacement Technology
Accuracy: The M7500 pump has enhanced volume accuracy and repeatability with new high resolution stepper motor control software. Volume repeatability is now up to 0.01mL. The user-selectable variable rate recipe has been demonstrated to reduce the volume of resist used.
Reduce Costs: The M7500 pump is configured with an on-board single pump controller. This new approach allows a reduced cost-per-dispense point. The on-board single pump controller is compatible with the industry standard CYBOR control architecture. Pump control is executed through the host process tool using discrete signals or RS232 / 485 serial communications. id-Range
Viscosity: The M7500 excels in mid-range viscosity, low volume dispense control. The dispense rate acceleration and deceleration is easily configured to minimize fluid instability (water hammer) at the critical end of the dispense. The acceleration / deceleration when applied between steps of the variable rate provide a predictable and smooth transition between rates.
Standard Features: All Teflon® Chemical Flow path EPR O-rings HP, High Performance Stepper Motor 3/8” Flare Fittings N2 purge of electronics 24VDC Operation On Board Controller Factory installed Interface Cables
M7500 Specifications:
Class Description Increments
Dispense Volume 0.01 to 16.0 mL 0.01 increments
Dispense Rate 0.01 to 3.0 mL/ sec 0.01 increments
Drawback Volume 0.100 to 8.000 mL 0.001 increments
Drawback Rate 0.01 to 3.0 mL/ sec 0.01 increments
Recharge Rate 0.01 to 3.0 mL/ sec 0.01 increments
Accuracy +/- 5% pre calibration offset
Repeatability 0.01 3 Sigma
Viscosity Range 100 to 3000 cp
Physical Dimension and Requirements: Foot Print: 6”W x 8.8” D x 11”H
Power requirement: 24 V 3 Amps
N2 60 psi at 5 SCFH (For N2 Purge Option Only)
Environmental 10°C to 40°C
Relative Humidity 10 to 90%,Non condensing
CE Certified
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